11/19/2010	9:17:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2010	9:17:57 AM	Recipe started at 9:17 AM
11/19/2010	9:17:57 AM	H2 valve closed
11/19/2010	9:17:57 AM	BCl3 valve closed
11/19/2010	9:17:57 AM	PH3 valve closed
11/19/2010	9:17:57 AM	SiCl4 pre valve closed
11/19/2010	9:17:57 AM	SiCl4 post valve closed
11/19/2010	9:17:57 AM	Main Vac valve closed
11/19/2010	9:17:57 AM	Bypass valve closed
11/19/2010	9:17:57 AM	Bubbler valve closed
11/19/2010	9:17:57 AM	Helium valve opened
11/19/2010	9:17:57 AM	Helium MFC set to  500.000000
11/19/2010	9:17:57 AM	H2 MFC set to  0.000000
11/19/2010	9:17:57 AM	BCl3 MFC set to  0.000000
11/19/2010	9:17:57 AM	PHl3 MFC set to  0.000000
11/19/2010	9:17:57 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:17:57 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:17:57 AM	Tube furnace set to 0
11/19/2010	9:19:17 AM	Helium valve closed
11/19/2010	9:19:17 AM	H2 valve closed
11/19/2010	9:19:17 AM	BCl3 valve closed
11/19/2010	9:19:17 AM	PH3 valve closed
11/19/2010	9:19:17 AM	SiCl4 pre valve closed
11/19/2010	9:19:17 AM	SiCl4 post valve closed
11/19/2010	9:19:17 AM	Main Vac valve closed
11/19/2010	9:19:17 AM	Bypass valve closed
11/19/2010	9:19:17 AM	Bubbler valve closed
11/19/2010	9:19:17 AM	Helium MFC set to  0.000000
11/19/2010	9:19:17 AM	H2 MFC set to  0.000000
11/19/2010	9:19:17 AM	BCl3 MFC set to  0.000000
11/19/2010	9:19:17 AM	PHl3 MFC set to  0.000000
11/19/2010	9:19:17 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:19:17 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:19:17 AM	Tube furnace set to 0
11/19/2010	9:19:17 AM	Run finished at 9:19 AM
11/19/2010	9:19:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2010	9:22:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/19/2010	9:22:51 AM	Recipe started at 9:22 AM
11/19/2010	9:22:51 AM	Helium valve closed
11/19/2010	9:22:51 AM	H2 valve closed
11/19/2010	9:22:51 AM	BCl3 valve closed
11/19/2010	9:22:51 AM	PH3 valve closed
11/19/2010	9:22:51 AM	SiCl4 pre valve closed
11/19/2010	9:22:51 AM	SiCl4 post valve closed
11/19/2010	9:22:51 AM	Main Vac valve closed
11/19/2010	9:22:51 AM	Bubbler valve closed
11/19/2010	9:22:51 AM	Bypass valve opened
11/19/2010	9:22:51 AM	Helium MFC set to  0.000000
11/19/2010	9:22:51 AM	H2 MFC set to  0.000000
11/19/2010	9:22:51 AM	BCl3 MFC set to  0.000000
11/19/2010	9:22:51 AM	PHl3 MFC set to  0.000000
11/19/2010	9:22:51 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:22:51 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:22:52 AM	Tube furnace set to 0
11/19/2010	9:23:43 AM	Helium valve closed
11/19/2010	9:23:43 AM	H2 valve closed
11/19/2010	9:23:43 AM	BCl3 valve closed
11/19/2010	9:23:43 AM	PH3 valve closed
11/19/2010	9:23:43 AM	SiCl4 pre valve closed
11/19/2010	9:23:43 AM	SiCl4 post valve closed
11/19/2010	9:23:43 AM	Bubbler valve closed
11/19/2010	9:23:43 AM	Main Vac valve opened
11/19/2010	9:23:43 AM	Bypass valve opened
11/19/2010	9:23:43 AM	Helium MFC set to  0.000000
11/19/2010	9:23:43 AM	H2 MFC set to  0.000000
11/19/2010	9:23:43 AM	BCl3 MFC set to  0.000000
11/19/2010	9:23:43 AM	PHl3 MFC set to  0.000000
11/19/2010	9:23:43 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:23:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:23:43 AM	Tube furnace set to 0
11/19/2010	9:24:41 AM	H2 valve closed
11/19/2010	9:24:41 AM	BCl3 valve closed
11/19/2010	9:24:41 AM	PH3 valve closed
11/19/2010	9:24:41 AM	SiCl4 pre valve closed
11/19/2010	9:24:41 AM	SiCl4 post valve closed
11/19/2010	9:24:41 AM	Bubbler valve closed
11/19/2010	9:24:41 AM	Helium valve opened
11/19/2010	9:24:41 AM	Main Vac valve opened
11/19/2010	9:24:41 AM	Bypass valve opened
11/19/2010	9:24:41 AM	Helium MFC set to  100.000000
11/19/2010	9:24:42 AM	H2 MFC set to  0.000000
11/19/2010	9:24:42 AM	BCl3 MFC set to  0.000000
11/19/2010	9:24:42 AM	PHl3 MFC set to  0.000000
11/19/2010	9:24:42 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:24:42 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:24:42 AM	Tube furnace set to 0
11/19/2010	9:25:42 AM	Helium valve closed
11/19/2010	9:25:42 AM	H2 valve closed
11/19/2010	9:25:42 AM	BCl3 valve closed
11/19/2010	9:25:42 AM	PH3 valve closed
11/19/2010	9:25:42 AM	SiCl4 pre valve closed
11/19/2010	9:25:42 AM	SiCl4 post valve closed
11/19/2010	9:25:42 AM	Bubbler valve closed
11/19/2010	9:25:42 AM	Main Vac valve opened
11/19/2010	9:25:42 AM	Bypass valve opened
11/19/2010	9:25:42 AM	Helium MFC set to  0.000000
11/19/2010	9:25:42 AM	H2 MFC set to  0.000000
11/19/2010	9:25:42 AM	BCl3 MFC set to  0.000000
11/19/2010	9:25:42 AM	PHl3 MFC set to  0.000000
11/19/2010	9:25:42 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:25:42 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:25:42 AM	Tube furnace set to 0
11/19/2010	9:26:42 AM	H2 valve closed
11/19/2010	9:26:42 AM	BCl3 valve closed
11/19/2010	9:26:42 AM	PH3 valve closed
11/19/2010	9:26:42 AM	SiCl4 pre valve closed
11/19/2010	9:26:42 AM	SiCl4 post valve closed
11/19/2010	9:26:42 AM	Bubbler valve closed
11/19/2010	9:26:42 AM	Helium valve opened
11/19/2010	9:26:42 AM	Main Vac valve opened
11/19/2010	9:26:42 AM	Bypass valve opened
11/19/2010	9:26:42 AM	Helium MFC set to  100.000000
11/19/2010	9:26:42 AM	H2 MFC set to  0.000000
11/19/2010	9:26:42 AM	BCl3 MFC set to  0.000000
11/19/2010	9:26:42 AM	PHl3 MFC set to  0.000000
11/19/2010	9:26:42 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:26:42 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:26:42 AM	Tube furnace set to 0
11/19/2010	9:27:42 AM	Helium valve closed
11/19/2010	9:27:42 AM	H2 valve closed
11/19/2010	9:27:42 AM	BCl3 valve closed
11/19/2010	9:27:42 AM	PH3 valve closed
11/19/2010	9:27:42 AM	SiCl4 pre valve closed
11/19/2010	9:27:42 AM	SiCl4 post valve closed
11/19/2010	9:27:42 AM	Bubbler valve closed
11/19/2010	9:27:42 AM	Main Vac valve opened
11/19/2010	9:27:42 AM	Bypass valve opened
11/19/2010	9:27:42 AM	Helium MFC set to  0.000000
11/19/2010	9:27:42 AM	H2 MFC set to  0.000000
11/19/2010	9:27:42 AM	BCl3 MFC set to  0.000000
11/19/2010	9:27:42 AM	PHl3 MFC set to  0.000000
11/19/2010	9:27:42 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:27:42 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:27:42 AM	Tube furnace set to 0
11/19/2010	9:28:42 AM	H2 valve closed
11/19/2010	9:28:42 AM	BCl3 valve closed
11/19/2010	9:28:42 AM	PH3 valve closed
11/19/2010	9:28:42 AM	SiCl4 pre valve closed
11/19/2010	9:28:42 AM	SiCl4 post valve closed
11/19/2010	9:28:42 AM	Bubbler valve closed
11/19/2010	9:28:42 AM	Helium valve opened
11/19/2010	9:28:42 AM	Main Vac valve opened
11/19/2010	9:28:42 AM	Bypass valve opened
11/19/2010	9:28:42 AM	Helium MFC set to  100.000000
11/19/2010	9:28:42 AM	H2 MFC set to  0.000000
11/19/2010	9:28:42 AM	BCl3 MFC set to  0.000000
11/19/2010	9:28:42 AM	PHl3 MFC set to  0.000000
11/19/2010	9:28:42 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:28:42 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:28:42 AM	Tube furnace set to 0
11/19/2010	9:29:42 AM	Helium valve closed
11/19/2010	9:29:42 AM	H2 valve closed
11/19/2010	9:29:42 AM	BCl3 valve closed
11/19/2010	9:29:42 AM	PH3 valve closed
11/19/2010	9:29:42 AM	SiCl4 pre valve closed
11/19/2010	9:29:42 AM	SiCl4 post valve closed
11/19/2010	9:29:42 AM	Bubbler valve closed
11/19/2010	9:29:42 AM	Main Vac valve opened
11/19/2010	9:29:42 AM	Bypass valve opened
11/19/2010	9:29:42 AM	Helium MFC set to  0.000000
11/19/2010	9:29:42 AM	H2 MFC set to  0.000000
11/19/2010	9:29:42 AM	BCl3 MFC set to  0.000000
11/19/2010	9:29:42 AM	PHl3 MFC set to  0.000000
11/19/2010	9:29:42 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:29:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:29:43 AM	Tube furnace set to 0
11/19/2010	9:30:43 AM	H2 valve closed
11/19/2010	9:30:43 AM	BCl3 valve closed
11/19/2010	9:30:43 AM	PH3 valve closed
11/19/2010	9:30:43 AM	SiCl4 pre valve closed
11/19/2010	9:30:43 AM	SiCl4 post valve closed
11/19/2010	9:30:43 AM	Bubbler valve closed
11/19/2010	9:30:43 AM	Helium valve opened
11/19/2010	9:30:43 AM	Main Vac valve opened
11/19/2010	9:30:43 AM	Bypass valve opened
11/19/2010	9:30:43 AM	Helium MFC set to  100.000000
11/19/2010	9:30:43 AM	H2 MFC set to  0.000000
11/19/2010	9:30:43 AM	BCl3 MFC set to  0.000000
11/19/2010	9:30:43 AM	PHl3 MFC set to  0.000000
11/19/2010	9:30:43 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:30:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:30:43 AM	Tube furnace set to 0
11/19/2010	9:31:43 AM	Helium valve closed
11/19/2010	9:31:43 AM	H2 valve closed
11/19/2010	9:31:43 AM	BCl3 valve closed
11/19/2010	9:31:43 AM	PH3 valve closed
11/19/2010	9:31:43 AM	SiCl4 pre valve closed
11/19/2010	9:31:43 AM	SiCl4 post valve closed
11/19/2010	9:31:43 AM	Bubbler valve closed
11/19/2010	9:31:43 AM	Main Vac valve opened
11/19/2010	9:31:43 AM	Bypass valve opened
11/19/2010	9:31:43 AM	Helium MFC set to  0.000000
11/19/2010	9:31:43 AM	H2 MFC set to  0.000000
11/19/2010	9:31:43 AM	BCl3 MFC set to  0.000000
11/19/2010	9:31:43 AM	PHl3 MFC set to  0.000000
11/19/2010	9:31:43 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:31:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:31:43 AM	Tube furnace set to 0
11/19/2010	9:32:43 AM	H2 valve closed
11/19/2010	9:32:43 AM	BCl3 valve closed
11/19/2010	9:32:43 AM	PH3 valve closed
11/19/2010	9:32:43 AM	SiCl4 pre valve closed
11/19/2010	9:32:43 AM	SiCl4 post valve closed
11/19/2010	9:32:43 AM	Bubbler valve closed
11/19/2010	9:32:43 AM	Helium valve opened
11/19/2010	9:32:43 AM	Main Vac valve opened
11/19/2010	9:32:43 AM	Bypass valve opened
11/19/2010	9:32:43 AM	Helium MFC set to  100.000000
11/19/2010	9:32:43 AM	H2 MFC set to  0.000000
11/19/2010	9:32:43 AM	BCl3 MFC set to  0.000000
11/19/2010	9:32:43 AM	PHl3 MFC set to  0.000000
11/19/2010	9:32:43 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:32:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:32:43 AM	Tube furnace set to 0
11/19/2010	9:33:43 AM	Helium valve closed
11/19/2010	9:33:43 AM	H2 valve closed
11/19/2010	9:33:43 AM	BCl3 valve closed
11/19/2010	9:33:43 AM	PH3 valve closed
11/19/2010	9:33:43 AM	SiCl4 pre valve closed
11/19/2010	9:33:43 AM	SiCl4 post valve closed
11/19/2010	9:33:43 AM	Bubbler valve closed
11/19/2010	9:33:43 AM	Main Vac valve opened
11/19/2010	9:33:43 AM	Bypass valve opened
11/19/2010	9:33:43 AM	Helium MFC set to  0.000000
11/19/2010	9:33:43 AM	H2 MFC set to  0.000000
11/19/2010	9:33:43 AM	BCl3 MFC set to  0.000000
11/19/2010	9:33:43 AM	PHl3 MFC set to  0.000000
11/19/2010	9:33:43 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:33:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:33:43 AM	Tube furnace set to 0
11/19/2010	9:34:43 AM	H2 valve closed
11/19/2010	9:34:43 AM	BCl3 valve closed
11/19/2010	9:34:43 AM	PH3 valve closed
11/19/2010	9:34:43 AM	SiCl4 pre valve closed
11/19/2010	9:34:43 AM	SiCl4 post valve closed
11/19/2010	9:34:43 AM	Bubbler valve closed
11/19/2010	9:34:43 AM	Helium valve opened
11/19/2010	9:34:43 AM	Main Vac valve opened
11/19/2010	9:34:43 AM	Bypass valve opened
11/19/2010	9:34:43 AM	Helium MFC set to  100.000000
11/19/2010	9:34:43 AM	H2 MFC set to  0.000000
11/19/2010	9:34:43 AM	BCl3 MFC set to  0.000000
11/19/2010	9:34:43 AM	PHl3 MFC set to  0.000000
11/19/2010	9:34:43 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:34:43 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:34:44 AM	Tube furnace set to 0
11/19/2010	9:35:44 AM	Helium valve closed
11/19/2010	9:35:44 AM	H2 valve closed
11/19/2010	9:35:44 AM	BCl3 valve closed
11/19/2010	9:35:44 AM	PH3 valve closed
11/19/2010	9:35:44 AM	SiCl4 pre valve closed
11/19/2010	9:35:44 AM	SiCl4 post valve closed
11/19/2010	9:35:44 AM	Bubbler valve closed
11/19/2010	9:35:44 AM	Main Vac valve opened
11/19/2010	9:35:44 AM	Bypass valve opened
11/19/2010	9:35:44 AM	Helium MFC set to  0.000000
11/19/2010	9:35:44 AM	H2 MFC set to  0.000000
11/19/2010	9:35:44 AM	BCl3 MFC set to  0.000000
11/19/2010	9:35:44 AM	PHl3 MFC set to  0.000000
11/19/2010	9:35:44 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:35:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:35:44 AM	Tube furnace set to 0
11/19/2010	9:36:44 AM	H2 valve closed
11/19/2010	9:36:44 AM	BCl3 valve closed
11/19/2010	9:36:44 AM	PH3 valve closed
11/19/2010	9:36:44 AM	SiCl4 pre valve closed
11/19/2010	9:36:44 AM	SiCl4 post valve closed
11/19/2010	9:36:44 AM	Bubbler valve closed
11/19/2010	9:36:44 AM	Helium valve opened
11/19/2010	9:36:44 AM	Main Vac valve opened
11/19/2010	9:36:44 AM	Bypass valve opened
11/19/2010	9:36:44 AM	Helium MFC set to  100.000000
11/19/2010	9:36:44 AM	H2 MFC set to  0.000000
11/19/2010	9:36:44 AM	BCl3 MFC set to  0.000000
11/19/2010	9:36:44 AM	PHl3 MFC set to  0.000000
11/19/2010	9:36:44 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:36:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:36:44 AM	Tube furnace set to 0
11/19/2010	9:37:44 AM	Helium valve closed
11/19/2010	9:37:44 AM	H2 valve closed
11/19/2010	9:37:44 AM	BCl3 valve closed
11/19/2010	9:37:44 AM	PH3 valve closed
11/19/2010	9:37:44 AM	SiCl4 pre valve closed
11/19/2010	9:37:44 AM	SiCl4 post valve closed
11/19/2010	9:37:44 AM	Bubbler valve closed
11/19/2010	9:37:44 AM	Main Vac valve opened
11/19/2010	9:37:44 AM	Bypass valve opened
11/19/2010	9:37:44 AM	Helium MFC set to  0.000000
11/19/2010	9:37:44 AM	H2 MFC set to  0.000000
11/19/2010	9:37:44 AM	BCl3 MFC set to  0.000000
11/19/2010	9:37:44 AM	PHl3 MFC set to  0.000000
11/19/2010	9:37:44 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:37:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:37:44 AM	Tube furnace set to 0
11/19/2010	9:38:44 AM	H2 valve closed
11/19/2010	9:38:44 AM	BCl3 valve closed
11/19/2010	9:38:44 AM	PH3 valve closed
11/19/2010	9:38:44 AM	SiCl4 pre valve closed
11/19/2010	9:38:44 AM	SiCl4 post valve closed
11/19/2010	9:38:44 AM	Bubbler valve closed
11/19/2010	9:38:44 AM	Helium valve opened
11/19/2010	9:38:44 AM	Main Vac valve opened
11/19/2010	9:38:44 AM	Bypass valve opened
11/19/2010	9:38:44 AM	Helium MFC set to  100.000000
11/19/2010	9:38:44 AM	H2 MFC set to  0.000000
11/19/2010	9:38:44 AM	BCl3 MFC set to  0.000000
11/19/2010	9:38:44 AM	PHl3 MFC set to  0.000000
11/19/2010	9:38:44 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:38:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:38:44 AM	Tube furnace set to 0
11/19/2010	9:39:44 AM	Helium valve closed
11/19/2010	9:39:44 AM	H2 valve closed
11/19/2010	9:39:44 AM	BCl3 valve closed
11/19/2010	9:39:44 AM	PH3 valve closed
11/19/2010	9:39:44 AM	SiCl4 pre valve closed
11/19/2010	9:39:44 AM	SiCl4 post valve closed
11/19/2010	9:39:44 AM	Bubbler valve closed
11/19/2010	9:39:44 AM	Main Vac valve opened
11/19/2010	9:39:44 AM	Bypass valve opened
11/19/2010	9:39:44 AM	Helium MFC set to  0.000000
11/19/2010	9:39:44 AM	H2 MFC set to  0.000000
11/19/2010	9:39:44 AM	BCl3 MFC set to  0.000000
11/19/2010	9:39:44 AM	PHl3 MFC set to  0.000000
11/19/2010	9:39:44 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:39:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:39:45 AM	Tube furnace set to 0
11/19/2010	9:40:45 AM	H2 valve closed
11/19/2010	9:40:45 AM	BCl3 valve closed
11/19/2010	9:40:45 AM	PH3 valve closed
11/19/2010	9:40:45 AM	SiCl4 pre valve closed
11/19/2010	9:40:45 AM	SiCl4 post valve closed
11/19/2010	9:40:45 AM	Bubbler valve closed
11/19/2010	9:40:45 AM	Helium valve opened
11/19/2010	9:40:45 AM	Main Vac valve opened
11/19/2010	9:40:45 AM	Bypass valve opened
11/19/2010	9:40:45 AM	Helium MFC set to  100.000000
11/19/2010	9:40:45 AM	H2 MFC set to  0.000000
11/19/2010	9:40:45 AM	BCl3 MFC set to  0.000000
11/19/2010	9:40:45 AM	PHl3 MFC set to  0.000000
11/19/2010	9:40:45 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:40:45 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:40:45 AM	Tube furnace set to 0
11/19/2010	9:41:45 AM	Helium valve closed
11/19/2010	9:41:45 AM	H2 valve closed
11/19/2010	9:41:45 AM	BCl3 valve closed
11/19/2010	9:41:45 AM	PH3 valve closed
11/19/2010	9:41:45 AM	SiCl4 pre valve closed
11/19/2010	9:41:45 AM	SiCl4 post valve closed
11/19/2010	9:41:45 AM	Bubbler valve closed
11/19/2010	9:41:45 AM	Main Vac valve opened
11/19/2010	9:41:45 AM	Bypass valve opened
11/19/2010	9:41:45 AM	Helium MFC set to  0.000000
11/19/2010	9:41:45 AM	H2 MFC set to  0.000000
11/19/2010	9:41:45 AM	BCl3 MFC set to  0.000000
11/19/2010	9:41:45 AM	PHl3 MFC set to  0.000000
11/19/2010	9:41:45 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:41:45 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:41:45 AM	Tube furnace set to 0
11/19/2010	9:42:45 AM	H2 valve closed
11/19/2010	9:42:45 AM	BCl3 valve closed
11/19/2010	9:42:45 AM	PH3 valve closed
11/19/2010	9:42:45 AM	SiCl4 pre valve closed
11/19/2010	9:42:45 AM	SiCl4 post valve closed
11/19/2010	9:42:45 AM	Bubbler valve closed
11/19/2010	9:42:45 AM	Helium valve opened
11/19/2010	9:42:45 AM	Main Vac valve opened
11/19/2010	9:42:45 AM	Bypass valve opened
11/19/2010	9:42:45 AM	Helium MFC set to  100.000000
11/19/2010	9:42:45 AM	H2 MFC set to  0.000000
11/19/2010	9:42:45 AM	BCl3 MFC set to  0.000000
11/19/2010	9:42:45 AM	PHl3 MFC set to  0.000000
11/19/2010	9:42:45 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:42:45 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:42:45 AM	Tube furnace set to 0
11/19/2010	9:43:45 AM	Helium valve closed
11/19/2010	9:43:45 AM	H2 valve closed
11/19/2010	9:43:45 AM	BCl3 valve closed
11/19/2010	9:43:45 AM	PH3 valve closed
11/19/2010	9:43:45 AM	SiCl4 pre valve closed
11/19/2010	9:43:45 AM	SiCl4 post valve closed
11/19/2010	9:43:45 AM	Bubbler valve closed
11/19/2010	9:43:45 AM	Main Vac valve opened
11/19/2010	9:43:45 AM	Bypass valve opened
11/19/2010	9:43:45 AM	Helium MFC set to  0.000000
11/19/2010	9:43:45 AM	H2 MFC set to  0.000000
11/19/2010	9:43:45 AM	BCl3 MFC set to  0.000000
11/19/2010	9:43:45 AM	PHl3 MFC set to  0.000000
11/19/2010	9:43:45 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:43:45 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:43:45 AM	Tube furnace set to 0
11/19/2010	9:43:46 AM	Run finished at 9:43 AM
11/19/2010	9:43:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/19/2010	9:52:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/19/2010	9:52:47 AM	Recipe started at 9:52 AM
11/19/2010	9:52:47 AM	Helium valve closed
11/19/2010	9:52:47 AM	H2 valve closed
11/19/2010	9:52:47 AM	BCl3 valve closed
11/19/2010	9:52:47 AM	PH3 valve closed
11/19/2010	9:52:47 AM	SiCl4 pre valve closed
11/19/2010	9:52:47 AM	SiCl4 post valve closed
11/19/2010	9:52:47 AM	Main Vac valve closed
11/19/2010	9:52:47 AM	Bubbler valve closed
11/19/2010	9:52:47 AM	Bypass valve opened
11/19/2010	9:52:47 AM	Helium MFC set to  0.000000
11/19/2010	9:52:47 AM	H2 MFC set to  0.000000
11/19/2010	9:52:47 AM	BCl3 MFC set to  0.000000
11/19/2010	9:52:47 AM	PHl3 MFC set to  0.000000
11/19/2010	9:52:47 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:52:47 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:52:47 AM	Tube furnace set to 0
11/19/2010	9:52:47 AM	Helium valve closed
11/19/2010	9:52:47 AM	H2 valve closed
11/19/2010	9:52:47 AM	BCl3 valve closed
11/19/2010	9:52:47 AM	PH3 valve closed
11/19/2010	9:52:47 AM	SiCl4 pre valve closed
11/19/2010	9:52:47 AM	SiCl4 post valve closed
11/19/2010	9:52:47 AM	Bubbler valve closed
11/19/2010	9:52:47 AM	Main Vac valve opened
11/19/2010	9:52:47 AM	Bypass valve opened
11/19/2010	9:52:47 AM	Helium MFC set to  0.000000
11/19/2010	9:52:47 AM	H2 MFC set to  0.000000
11/19/2010	9:52:47 AM	BCl3 MFC set to  0.000000
11/19/2010	9:52:47 AM	PHl3 MFC set to  0.000000
11/19/2010	9:52:47 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:52:47 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:52:47 AM	Tube furnace set to 0
11/19/2010	9:53:48 AM	H2 valve closed
11/19/2010	9:53:48 AM	BCl3 valve closed
11/19/2010	9:53:48 AM	PH3 valve closed
11/19/2010	9:53:48 AM	SiCl4 pre valve closed
11/19/2010	9:53:48 AM	SiCl4 post valve closed
11/19/2010	9:53:48 AM	Bubbler valve closed
11/19/2010	9:53:48 AM	Helium valve opened
11/19/2010	9:53:48 AM	Main Vac valve opened
11/19/2010	9:53:48 AM	Bypass valve opened
11/19/2010	9:53:48 AM	Helium MFC set to  100.000000
11/19/2010	9:53:48 AM	H2 MFC set to  0.000000
11/19/2010	9:53:48 AM	BCl3 MFC set to  0.000000
11/19/2010	9:53:48 AM	PHl3 MFC set to  0.000000
11/19/2010	9:53:48 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:53:48 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:53:48 AM	Tube furnace set to 0
11/19/2010	9:54:48 AM	Helium valve closed
11/19/2010	9:54:48 AM	H2 valve closed
11/19/2010	9:54:48 AM	BCl3 valve closed
11/19/2010	9:54:48 AM	PH3 valve closed
11/19/2010	9:54:48 AM	SiCl4 pre valve closed
11/19/2010	9:54:48 AM	SiCl4 post valve closed
11/19/2010	9:54:48 AM	Bubbler valve closed
11/19/2010	9:54:48 AM	Main Vac valve opened
11/19/2010	9:54:48 AM	Bypass valve opened
11/19/2010	9:54:48 AM	Helium MFC set to  0.000000
11/19/2010	9:54:48 AM	H2 MFC set to  0.000000
11/19/2010	9:54:48 AM	BCl3 MFC set to  0.000000
11/19/2010	9:54:48 AM	PHl3 MFC set to  0.000000
11/19/2010	9:54:48 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:54:48 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:54:48 AM	Tube furnace set to 0
11/19/2010	9:55:48 AM	H2 valve closed
11/19/2010	9:55:48 AM	BCl3 valve closed
11/19/2010	9:55:48 AM	PH3 valve closed
11/19/2010	9:55:48 AM	SiCl4 pre valve closed
11/19/2010	9:55:48 AM	SiCl4 post valve closed
11/19/2010	9:55:48 AM	Bubbler valve closed
11/19/2010	9:55:48 AM	Helium valve opened
11/19/2010	9:55:48 AM	Main Vac valve opened
11/19/2010	9:55:48 AM	Bypass valve opened
11/19/2010	9:55:48 AM	Helium MFC set to  100.000000
11/19/2010	9:55:48 AM	H2 MFC set to  0.000000
11/19/2010	9:55:48 AM	BCl3 MFC set to  0.000000
11/19/2010	9:55:48 AM	PHl3 MFC set to  0.000000
11/19/2010	9:55:48 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:55:48 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:55:48 AM	Tube furnace set to 0
11/19/2010	9:56:48 AM	Helium valve closed
11/19/2010	9:56:48 AM	H2 valve closed
11/19/2010	9:56:48 AM	BCl3 valve closed
11/19/2010	9:56:48 AM	PH3 valve closed
11/19/2010	9:56:48 AM	SiCl4 pre valve closed
11/19/2010	9:56:48 AM	SiCl4 post valve closed
11/19/2010	9:56:48 AM	Bubbler valve closed
11/19/2010	9:56:48 AM	Main Vac valve opened
11/19/2010	9:56:48 AM	Bypass valve opened
11/19/2010	9:56:48 AM	Helium MFC set to  0.000000
11/19/2010	9:56:48 AM	H2 MFC set to  0.000000
11/19/2010	9:56:48 AM	BCl3 MFC set to  0.000000
11/19/2010	9:56:48 AM	PHl3 MFC set to  0.000000
11/19/2010	9:56:48 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:56:48 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:56:49 AM	Tube furnace set to 0
11/19/2010	9:57:49 AM	H2 valve closed
11/19/2010	9:57:49 AM	BCl3 valve closed
11/19/2010	9:57:49 AM	PH3 valve closed
11/19/2010	9:57:49 AM	SiCl4 pre valve closed
11/19/2010	9:57:49 AM	SiCl4 post valve closed
11/19/2010	9:57:49 AM	Bubbler valve closed
11/19/2010	9:57:49 AM	Helium valve opened
11/19/2010	9:57:49 AM	Main Vac valve opened
11/19/2010	9:57:49 AM	Bypass valve opened
11/19/2010	9:57:49 AM	Helium MFC set to  100.000000
11/19/2010	9:57:49 AM	H2 MFC set to  0.000000
11/19/2010	9:57:49 AM	BCl3 MFC set to  0.000000
11/19/2010	9:57:49 AM	PHl3 MFC set to  0.000000
11/19/2010	9:57:49 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:57:49 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:57:49 AM	Tube furnace set to 0
11/19/2010	9:58:49 AM	Helium valve closed
11/19/2010	9:58:49 AM	H2 valve closed
11/19/2010	9:58:49 AM	BCl3 valve closed
11/19/2010	9:58:49 AM	PH3 valve closed
11/19/2010	9:58:49 AM	SiCl4 pre valve closed
11/19/2010	9:58:49 AM	SiCl4 post valve closed
11/19/2010	9:58:49 AM	Bubbler valve closed
11/19/2010	9:58:49 AM	Main Vac valve opened
11/19/2010	9:58:49 AM	Bypass valve opened
11/19/2010	9:58:49 AM	Helium MFC set to  0.000000
11/19/2010	9:58:49 AM	H2 MFC set to  0.000000
11/19/2010	9:58:49 AM	BCl3 MFC set to  0.000000
11/19/2010	9:58:49 AM	PHl3 MFC set to  0.000000
11/19/2010	9:58:49 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:58:49 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:58:49 AM	Tube furnace set to 0
11/19/2010	9:59:49 AM	H2 valve closed
11/19/2010	9:59:49 AM	BCl3 valve closed
11/19/2010	9:59:49 AM	PH3 valve closed
11/19/2010	9:59:49 AM	SiCl4 pre valve closed
11/19/2010	9:59:49 AM	SiCl4 post valve closed
11/19/2010	9:59:49 AM	Bubbler valve closed
11/19/2010	9:59:49 AM	Helium valve opened
11/19/2010	9:59:49 AM	Main Vac valve opened
11/19/2010	9:59:49 AM	Bypass valve opened
11/19/2010	9:59:49 AM	Helium MFC set to  100.000000
11/19/2010	9:59:49 AM	H2 MFC set to  0.000000
11/19/2010	9:59:49 AM	BCl3 MFC set to  0.000000
11/19/2010	9:59:49 AM	PHl3 MFC set to  0.000000
11/19/2010	9:59:49 AM	SiCl4 MFC set to  0.000000
11/19/2010	9:59:49 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	9:59:49 AM	Tube furnace set to 0
11/19/2010	10:00:49 AM	Helium valve closed
11/19/2010	10:00:49 AM	H2 valve closed
11/19/2010	10:00:49 AM	BCl3 valve closed
11/19/2010	10:00:49 AM	PH3 valve closed
11/19/2010	10:00:49 AM	SiCl4 pre valve closed
11/19/2010	10:00:49 AM	SiCl4 post valve closed
11/19/2010	10:00:49 AM	Bubbler valve closed
11/19/2010	10:00:50 AM	Main Vac valve opened
11/19/2010	10:00:50 AM	Bypass valve opened
11/19/2010	10:00:50 AM	Helium MFC set to  0.000000
11/19/2010	10:00:50 AM	H2 MFC set to  0.000000
11/19/2010	10:00:50 AM	BCl3 MFC set to  0.000000
11/19/2010	10:00:50 AM	PHl3 MFC set to  0.000000
11/19/2010	10:00:50 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:00:50 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:00:50 AM	Tube furnace set to 0
11/19/2010	10:01:50 AM	H2 valve closed
11/19/2010	10:01:50 AM	BCl3 valve closed
11/19/2010	10:01:50 AM	PH3 valve closed
11/19/2010	10:01:50 AM	SiCl4 pre valve closed
11/19/2010	10:01:50 AM	SiCl4 post valve closed
11/19/2010	10:01:50 AM	Bubbler valve closed
11/19/2010	10:01:50 AM	Helium valve opened
11/19/2010	10:01:50 AM	Main Vac valve opened
11/19/2010	10:01:50 AM	Bypass valve opened
11/19/2010	10:01:50 AM	Helium MFC set to  100.000000
11/19/2010	10:01:50 AM	H2 MFC set to  0.000000
11/19/2010	10:01:50 AM	BCl3 MFC set to  0.000000
11/19/2010	10:01:50 AM	PHl3 MFC set to  0.000000
11/19/2010	10:01:50 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:01:50 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:01:50 AM	Tube furnace set to 0
11/19/2010	10:02:50 AM	Helium valve closed
11/19/2010	10:02:50 AM	H2 valve closed
11/19/2010	10:02:50 AM	BCl3 valve closed
11/19/2010	10:02:50 AM	PH3 valve closed
11/19/2010	10:02:50 AM	SiCl4 pre valve closed
11/19/2010	10:02:50 AM	SiCl4 post valve closed
11/19/2010	10:02:50 AM	Bubbler valve closed
11/19/2010	10:02:50 AM	Main Vac valve opened
11/19/2010	10:02:50 AM	Bypass valve opened
11/19/2010	10:02:50 AM	Helium MFC set to  0.000000
11/19/2010	10:02:50 AM	H2 MFC set to  0.000000
11/19/2010	10:02:50 AM	BCl3 MFC set to  0.000000
11/19/2010	10:02:50 AM	PHl3 MFC set to  0.000000
11/19/2010	10:02:50 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:02:50 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:02:50 AM	Tube furnace set to 0
11/19/2010	10:03:50 AM	H2 valve closed
11/19/2010	10:03:50 AM	BCl3 valve closed
11/19/2010	10:03:50 AM	PH3 valve closed
11/19/2010	10:03:50 AM	SiCl4 pre valve closed
11/19/2010	10:03:50 AM	SiCl4 post valve closed
11/19/2010	10:03:50 AM	Bubbler valve closed
11/19/2010	10:03:50 AM	Helium valve opened
11/19/2010	10:03:50 AM	Main Vac valve opened
11/19/2010	10:03:50 AM	Bypass valve opened
11/19/2010	10:03:50 AM	Helium MFC set to  100.000000
11/19/2010	10:03:50 AM	H2 MFC set to  0.000000
11/19/2010	10:03:50 AM	BCl3 MFC set to  0.000000
11/19/2010	10:03:50 AM	PHl3 MFC set to  0.000000
11/19/2010	10:03:50 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:03:50 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:03:50 AM	Tube furnace set to 0
11/19/2010	10:04:50 AM	Helium valve closed
11/19/2010	10:04:50 AM	H2 valve closed
11/19/2010	10:04:50 AM	BCl3 valve closed
11/19/2010	10:04:50 AM	PH3 valve closed
11/19/2010	10:04:50 AM	SiCl4 pre valve closed
11/19/2010	10:04:50 AM	SiCl4 post valve closed
11/19/2010	10:04:50 AM	Bubbler valve closed
11/19/2010	10:04:50 AM	Main Vac valve opened
11/19/2010	10:04:50 AM	Bypass valve opened
11/19/2010	10:04:50 AM	Helium MFC set to  0.000000
11/19/2010	10:04:50 AM	H2 MFC set to  0.000000
11/19/2010	10:04:50 AM	BCl3 MFC set to  0.000000
11/19/2010	10:04:50 AM	PHl3 MFC set to  0.000000
11/19/2010	10:04:50 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:04:50 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:04:51 AM	Tube furnace set to 0
11/19/2010	10:05:41 AM	Run aborted at 10:05 AM
11/19/2010	10:05:41 AM	Helium valve closed
11/19/2010	10:05:41 AM	H2 valve closed
11/19/2010	10:05:41 AM	BCl3 valve closed
11/19/2010	10:05:41 AM	PH3 valve closed
11/19/2010	10:05:41 AM	SiCl4 pre valve closed
11/19/2010	10:05:41 AM	SiCl4 post valve closed
11/19/2010	10:05:41 AM	Bypass valve closed
11/19/2010	10:05:41 AM	Main Vac valve closed
11/19/2010	10:05:41 AM	Bubbler valve closed
11/19/2010	10:05:41 AM	Helium MFC set to  0.000000
11/19/2010	10:05:41 AM	H2 MFC set to  0.000000
11/19/2010	10:05:41 AM	BCl3 MFC set to  0.000000
11/19/2010	10:05:41 AM	PHl3 MFC set to  0.000000
11/19/2010	10:05:41 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:05:41 AM	Tube furnace set to 0
11/19/2010	10:05:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/19/2010	10:06:14 AM	Recipe started at 10:06 AM
11/19/2010	10:06:14 AM	Helium valve closed
11/19/2010	10:06:14 AM	BCl3 valve closed
11/19/2010	10:06:14 AM	PH3 valve closed
11/19/2010	10:06:14 AM	SiCl4 pre valve closed
11/19/2010	10:06:14 AM	SiCl4 post valve closed
11/19/2010	10:06:14 AM	Main Vac valve closed
11/19/2010	10:06:14 AM	Bypass valve closed
11/19/2010	10:06:14 AM	Bubbler valve closed
11/19/2010	10:06:14 AM	H2 valve opened
11/19/2010	10:06:14 AM	Helium MFC set to  0.000000
11/19/2010	10:06:14 AM	H2 MFC set to  500.000000
11/19/2010	10:06:14 AM	BCl3 MFC set to  0.000000
11/19/2010	10:06:14 AM	PHl3 MFC set to  0.000000
11/19/2010	10:06:14 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:06:14 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:06:14 AM	Tube furnace set to 0
11/19/2010	10:07:35 AM	Helium valve closed
11/19/2010	10:07:35 AM	BCl3 valve closed
11/19/2010	10:07:35 AM	PH3 valve closed
11/19/2010	10:07:35 AM	SiCl4 pre valve closed
11/19/2010	10:07:35 AM	SiCl4 post valve closed
11/19/2010	10:07:35 AM	Main Vac valve closed
11/19/2010	10:07:35 AM	Bypass valve closed
11/19/2010	10:07:35 AM	H2 valve opened
11/19/2010	10:07:35 AM	Bubbler valve opened
11/19/2010	10:07:35 AM	Helium MFC set to  0.000000
11/19/2010	10:07:35 AM	H2 MFC set to  500.000000
11/19/2010	10:07:35 AM	BCl3 MFC set to  0.000000
11/19/2010	10:07:35 AM	PHl3 MFC set to  0.000000
11/19/2010	10:07:35 AM	SiCl4 MFC set to  0.000000
11/19/2010	10:07:35 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:07:36 AM	Tube furnace set to 1000
11/19/2010	10:27:36 AM	Helium valve closed
11/19/2010	10:27:36 AM	BCl3 valve closed
11/19/2010	10:27:36 AM	PH3 valve closed
11/19/2010	10:27:36 AM	Main Vac valve closed
11/19/2010	10:27:36 AM	Bypass valve closed
11/19/2010	10:27:36 AM	H2 valve opened
11/19/2010	10:27:36 AM	SiCl4 pre valve opened
11/19/2010	10:27:36 AM	SiCl4 post valve opened
11/19/2010	10:27:36 AM	Bubbler valve opened
11/19/2010	10:27:36 AM	Helium MFC set to  0.000000
11/19/2010	10:27:36 AM	H2 MFC set to  500.000000
11/19/2010	10:27:36 AM	BCl3 MFC set to  0.000000
11/19/2010	10:27:36 AM	PHl3 MFC set to  0.000000
11/19/2010	10:27:36 AM	SiCl4 MFC set to  50.000000
11/19/2010	10:27:36 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	10:27:36 AM	Tube furnace set to 1000
11/19/2010	11:27:36 AM	H2 valve closed
11/19/2010	11:27:36 AM	BCl3 valve closed
11/19/2010	11:27:36 AM	PH3 valve closed
11/19/2010	11:27:36 AM	SiCl4 pre valve closed
11/19/2010	11:27:36 AM	SiCl4 post valve closed
11/19/2010	11:27:36 AM	Main Vac valve closed
11/19/2010	11:27:36 AM	Bypass valve closed
11/19/2010	11:27:36 AM	Helium valve opened
11/19/2010	11:27:36 AM	Bubbler valve opened
11/19/2010	11:27:36 AM	Helium MFC set to  500.000000
11/19/2010	11:27:36 AM	H2 MFC set to  0.000000
11/19/2010	11:27:36 AM	BCl3 MFC set to  0.000000
11/19/2010	11:27:36 AM	PHl3 MFC set to  0.000000
11/19/2010	11:27:36 AM	SiCl4 MFC set to  0.000000
11/19/2010	11:27:36 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	11:27:36 AM	Tube furnace set to 950
11/19/2010	11:32:36 AM	H2 valve closed
11/19/2010	11:32:36 AM	BCl3 valve closed
11/19/2010	11:32:36 AM	PH3 valve closed
11/19/2010	11:32:36 AM	SiCl4 pre valve closed
11/19/2010	11:32:36 AM	SiCl4 post valve closed
11/19/2010	11:32:36 AM	Main Vac valve closed
11/19/2010	11:32:36 AM	Bypass valve closed
11/19/2010	11:32:36 AM	Helium valve opened
11/19/2010	11:32:36 AM	Bubbler valve opened
11/19/2010	11:32:36 AM	Helium MFC set to  500.000000
11/19/2010	11:32:36 AM	H2 MFC set to  0.000000
11/19/2010	11:32:36 AM	BCl3 MFC set to  0.000000
11/19/2010	11:32:36 AM	PHl3 MFC set to  0.000000
11/19/2010	11:32:36 AM	SiCl4 MFC set to  0.000000
11/19/2010	11:32:36 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	11:32:36 AM	Tube furnace set to 900
11/19/2010	11:37:36 AM	H2 valve closed
11/19/2010	11:37:36 AM	BCl3 valve closed
11/19/2010	11:37:36 AM	PH3 valve closed
11/19/2010	11:37:36 AM	SiCl4 pre valve closed
11/19/2010	11:37:36 AM	SiCl4 post valve closed
11/19/2010	11:37:36 AM	Main Vac valve closed
11/19/2010	11:37:36 AM	Bypass valve closed
11/19/2010	11:37:36 AM	Helium valve opened
11/19/2010	11:37:36 AM	Bubbler valve opened
11/19/2010	11:37:36 AM	Helium MFC set to  500.000000
11/19/2010	11:37:36 AM	H2 MFC set to  0.000000
11/19/2010	11:37:36 AM	BCl3 MFC set to  0.000000
11/19/2010	11:37:36 AM	PHl3 MFC set to  0.000000
11/19/2010	11:37:36 AM	SiCl4 MFC set to  0.000000
11/19/2010	11:37:36 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	11:37:36 AM	Tube furnace set to 850
11/19/2010	11:41:49 AM	Run aborted at 11:41 AM
11/19/2010	11:41:49 AM	Helium valve closed
11/19/2010	11:41:49 AM	H2 valve closed
11/19/2010	11:41:49 AM	BCl3 valve closed
11/19/2010	11:41:49 AM	PH3 valve closed
11/19/2010	11:41:49 AM	SiCl4 pre valve closed
11/19/2010	11:41:49 AM	SiCl4 post valve closed
11/19/2010	11:41:49 AM	Bypass valve closed
11/19/2010	11:41:49 AM	Main Vac valve closed
11/19/2010	11:41:49 AM	Bubbler valve closed
11/19/2010	11:41:49 AM	Helium MFC set to  0.000000
11/19/2010	11:41:49 AM	H2 MFC set to  0.000000
11/19/2010	11:41:49 AM	BCl3 MFC set to  0.000000
11/19/2010	11:41:49 AM	PHl3 MFC set to  0.000000
11/19/2010	11:41:49 AM	SiCl4 MFC set to  0.000000
11/19/2010	11:41:49 AM	Tube furnace set to 0
11/19/2010	11:58:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/19/2010	11:59:07 AM	Recipe started at 11:59 AM
11/19/2010	11:59:07 AM	Helium valve closed
11/19/2010	11:59:07 AM	H2 valve closed
11/19/2010	11:59:07 AM	BCl3 valve closed
11/19/2010	11:59:07 AM	PH3 valve closed
11/19/2010	11:59:07 AM	SiCl4 pre valve closed
11/19/2010	11:59:07 AM	SiCl4 post valve closed
11/19/2010	11:59:07 AM	Main Vac valve closed
11/19/2010	11:59:07 AM	Bubbler valve closed
11/19/2010	11:59:07 AM	Bypass valve opened
11/19/2010	11:59:07 AM	Helium MFC set to  0.000000
11/19/2010	11:59:07 AM	H2 MFC set to  0.000000
11/19/2010	11:59:07 AM	BCl3 MFC set to  0.000000
11/19/2010	11:59:07 AM	PHl3 MFC set to  0.000000
11/19/2010	11:59:07 AM	SiCl4 MFC set to  0.000000
11/19/2010	11:59:07 AM	Bypass solenoid MFC set to  0.000000
11/19/2010	11:59:07 AM	Tube furnace set to 0
11/19/2010	12:00:01 PM	Helium valve closed
11/19/2010	12:00:01 PM	H2 valve closed
11/19/2010	12:00:01 PM	BCl3 valve closed
11/19/2010	12:00:01 PM	PH3 valve closed
11/19/2010	12:00:01 PM	SiCl4 pre valve closed
11/19/2010	12:00:01 PM	SiCl4 post valve closed
11/19/2010	12:00:01 PM	Bubbler valve closed
11/19/2010	12:00:01 PM	Main Vac valve opened
11/19/2010	12:00:01 PM	Bypass valve opened
11/19/2010	12:00:01 PM	Helium MFC set to  0.000000
11/19/2010	12:00:01 PM	H2 MFC set to  0.000000
11/19/2010	12:00:01 PM	BCl3 MFC set to  0.000000
11/19/2010	12:00:01 PM	PHl3 MFC set to  0.000000
11/19/2010	12:00:01 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:00:01 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:00:01 PM	Tube furnace set to 0
11/19/2010	12:01:01 PM	H2 valve closed
11/19/2010	12:01:01 PM	BCl3 valve closed
11/19/2010	12:01:01 PM	PH3 valve closed
11/19/2010	12:01:01 PM	SiCl4 pre valve closed
11/19/2010	12:01:01 PM	SiCl4 post valve closed
11/19/2010	12:01:01 PM	Bubbler valve closed
11/19/2010	12:01:01 PM	Helium valve opened
11/19/2010	12:01:01 PM	Main Vac valve opened
11/19/2010	12:01:01 PM	Bypass valve opened
11/19/2010	12:01:01 PM	Helium MFC set to  100.000000
11/19/2010	12:01:01 PM	H2 MFC set to  0.000000
11/19/2010	12:01:01 PM	BCl3 MFC set to  0.000000
11/19/2010	12:01:01 PM	PHl3 MFC set to  0.000000
11/19/2010	12:01:01 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:01:01 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:01:01 PM	Tube furnace set to 0
11/19/2010	12:02:01 PM	Helium valve closed
11/19/2010	12:02:01 PM	H2 valve closed
11/19/2010	12:02:01 PM	BCl3 valve closed
11/19/2010	12:02:01 PM	PH3 valve closed
11/19/2010	12:02:01 PM	SiCl4 pre valve closed
11/19/2010	12:02:01 PM	SiCl4 post valve closed
11/19/2010	12:02:01 PM	Bubbler valve closed
11/19/2010	12:02:01 PM	Main Vac valve opened
11/19/2010	12:02:01 PM	Bypass valve opened
11/19/2010	12:02:01 PM	Helium MFC set to  0.000000
11/19/2010	12:02:01 PM	H2 MFC set to  0.000000
11/19/2010	12:02:01 PM	BCl3 MFC set to  0.000000
11/19/2010	12:02:01 PM	PHl3 MFC set to  0.000000
11/19/2010	12:02:01 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:02:01 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:02:02 PM	Tube furnace set to 0
11/19/2010	12:03:02 PM	H2 valve closed
11/19/2010	12:03:02 PM	BCl3 valve closed
11/19/2010	12:03:02 PM	PH3 valve closed
11/19/2010	12:03:02 PM	SiCl4 pre valve closed
11/19/2010	12:03:02 PM	SiCl4 post valve closed
11/19/2010	12:03:02 PM	Bubbler valve closed
11/19/2010	12:03:02 PM	Helium valve opened
11/19/2010	12:03:02 PM	Main Vac valve opened
11/19/2010	12:03:02 PM	Bypass valve opened
11/19/2010	12:03:02 PM	Helium MFC set to  100.000000
11/19/2010	12:03:02 PM	H2 MFC set to  0.000000
11/19/2010	12:03:02 PM	BCl3 MFC set to  0.000000
11/19/2010	12:03:02 PM	PHl3 MFC set to  0.000000
11/19/2010	12:03:02 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:03:02 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:03:02 PM	Tube furnace set to 0
11/19/2010	12:04:02 PM	Helium valve closed
11/19/2010	12:04:02 PM	H2 valve closed
11/19/2010	12:04:02 PM	BCl3 valve closed
11/19/2010	12:04:02 PM	PH3 valve closed
11/19/2010	12:04:02 PM	SiCl4 pre valve closed
11/19/2010	12:04:02 PM	SiCl4 post valve closed
11/19/2010	12:04:02 PM	Bubbler valve closed
11/19/2010	12:04:02 PM	Main Vac valve opened
11/19/2010	12:04:02 PM	Bypass valve opened
11/19/2010	12:04:02 PM	Helium MFC set to  0.000000
11/19/2010	12:04:02 PM	H2 MFC set to  0.000000
11/19/2010	12:04:02 PM	BCl3 MFC set to  0.000000
11/19/2010	12:04:02 PM	PHl3 MFC set to  0.000000
11/19/2010	12:04:02 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:04:02 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:04:02 PM	Tube furnace set to 0
11/19/2010	12:05:02 PM	H2 valve closed
11/19/2010	12:05:02 PM	BCl3 valve closed
11/19/2010	12:05:02 PM	PH3 valve closed
11/19/2010	12:05:02 PM	SiCl4 pre valve closed
11/19/2010	12:05:02 PM	SiCl4 post valve closed
11/19/2010	12:05:02 PM	Bubbler valve closed
11/19/2010	12:05:02 PM	Helium valve opened
11/19/2010	12:05:02 PM	Main Vac valve opened
11/19/2010	12:05:02 PM	Bypass valve opened
11/19/2010	12:05:02 PM	Helium MFC set to  100.000000
11/19/2010	12:05:02 PM	H2 MFC set to  0.000000
11/19/2010	12:05:02 PM	BCl3 MFC set to  0.000000
11/19/2010	12:05:02 PM	PHl3 MFC set to  0.000000
11/19/2010	12:05:02 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:05:02 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:05:02 PM	Tube furnace set to 0
11/19/2010	12:06:02 PM	Helium valve closed
11/19/2010	12:06:02 PM	H2 valve closed
11/19/2010	12:06:02 PM	BCl3 valve closed
11/19/2010	12:06:02 PM	PH3 valve closed
11/19/2010	12:06:02 PM	SiCl4 pre valve closed
11/19/2010	12:06:02 PM	SiCl4 post valve closed
11/19/2010	12:06:02 PM	Bubbler valve closed
11/19/2010	12:06:02 PM	Main Vac valve opened
11/19/2010	12:06:02 PM	Bypass valve opened
11/19/2010	12:06:02 PM	Helium MFC set to  0.000000
11/19/2010	12:06:02 PM	H2 MFC set to  0.000000
11/19/2010	12:06:02 PM	BCl3 MFC set to  0.000000
11/19/2010	12:06:02 PM	PHl3 MFC set to  0.000000
11/19/2010	12:06:02 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:06:02 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:06:02 PM	Tube furnace set to 0
11/19/2010	12:07:02 PM	H2 valve closed
11/19/2010	12:07:02 PM	BCl3 valve closed
11/19/2010	12:07:02 PM	PH3 valve closed
11/19/2010	12:07:02 PM	SiCl4 pre valve closed
11/19/2010	12:07:02 PM	SiCl4 post valve closed
11/19/2010	12:07:02 PM	Bubbler valve closed
11/19/2010	12:07:02 PM	Helium valve opened
11/19/2010	12:07:02 PM	Main Vac valve opened
11/19/2010	12:07:02 PM	Bypass valve opened
11/19/2010	12:07:02 PM	Helium MFC set to  100.000000
11/19/2010	12:07:02 PM	H2 MFC set to  0.000000
11/19/2010	12:07:02 PM	BCl3 MFC set to  0.000000
11/19/2010	12:07:02 PM	PHl3 MFC set to  0.000000
11/19/2010	12:07:02 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:07:02 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:07:03 PM	Tube furnace set to 0
11/19/2010	12:08:03 PM	Helium valve closed
11/19/2010	12:08:03 PM	H2 valve closed
11/19/2010	12:08:03 PM	BCl3 valve closed
11/19/2010	12:08:03 PM	PH3 valve closed
11/19/2010	12:08:03 PM	SiCl4 pre valve closed
11/19/2010	12:08:03 PM	SiCl4 post valve closed
11/19/2010	12:08:03 PM	Bubbler valve closed
11/19/2010	12:08:03 PM	Main Vac valve opened
11/19/2010	12:08:03 PM	Bypass valve opened
11/19/2010	12:08:03 PM	Helium MFC set to  0.000000
11/19/2010	12:08:03 PM	H2 MFC set to  0.000000
11/19/2010	12:08:03 PM	BCl3 MFC set to  0.000000
11/19/2010	12:08:03 PM	PHl3 MFC set to  0.000000
11/19/2010	12:08:03 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:08:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:08:03 PM	Tube furnace set to 0
11/19/2010	12:09:03 PM	H2 valve closed
11/19/2010	12:09:03 PM	BCl3 valve closed
11/19/2010	12:09:03 PM	PH3 valve closed
11/19/2010	12:09:03 PM	SiCl4 pre valve closed
11/19/2010	12:09:03 PM	SiCl4 post valve closed
11/19/2010	12:09:03 PM	Bubbler valve closed
11/19/2010	12:09:03 PM	Helium valve opened
11/19/2010	12:09:03 PM	Main Vac valve opened
11/19/2010	12:09:03 PM	Bypass valve opened
11/19/2010	12:09:03 PM	Helium MFC set to  100.000000
11/19/2010	12:09:03 PM	H2 MFC set to  0.000000
11/19/2010	12:09:03 PM	BCl3 MFC set to  0.000000
11/19/2010	12:09:03 PM	PHl3 MFC set to  0.000000
11/19/2010	12:09:03 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:09:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:09:03 PM	Tube furnace set to 0
11/19/2010	12:10:03 PM	Helium valve closed
11/19/2010	12:10:03 PM	H2 valve closed
11/19/2010	12:10:03 PM	BCl3 valve closed
11/19/2010	12:10:03 PM	PH3 valve closed
11/19/2010	12:10:03 PM	SiCl4 pre valve closed
11/19/2010	12:10:03 PM	SiCl4 post valve closed
11/19/2010	12:10:03 PM	Bubbler valve closed
11/19/2010	12:10:03 PM	Main Vac valve opened
11/19/2010	12:10:03 PM	Bypass valve opened
11/19/2010	12:10:03 PM	Helium MFC set to  0.000000
11/19/2010	12:10:03 PM	H2 MFC set to  0.000000
11/19/2010	12:10:03 PM	BCl3 MFC set to  0.000000
11/19/2010	12:10:03 PM	PHl3 MFC set to  0.000000
11/19/2010	12:10:03 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:10:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:10:03 PM	Tube furnace set to 0
11/19/2010	12:11:03 PM	H2 valve closed
11/19/2010	12:11:03 PM	BCl3 valve closed
11/19/2010	12:11:03 PM	PH3 valve closed
11/19/2010	12:11:03 PM	SiCl4 pre valve closed
11/19/2010	12:11:03 PM	SiCl4 post valve closed
11/19/2010	12:11:03 PM	Bubbler valve closed
11/19/2010	12:11:03 PM	Helium valve opened
11/19/2010	12:11:03 PM	Main Vac valve opened
11/19/2010	12:11:03 PM	Bypass valve opened
11/19/2010	12:11:03 PM	Helium MFC set to  100.000000
11/19/2010	12:11:03 PM	H2 MFC set to  0.000000
11/19/2010	12:11:03 PM	BCl3 MFC set to  0.000000
11/19/2010	12:11:03 PM	PHl3 MFC set to  0.000000
11/19/2010	12:11:03 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:11:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:11:03 PM	Tube furnace set to 0
11/19/2010	12:12:03 PM	Helium valve closed
11/19/2010	12:12:03 PM	H2 valve closed
11/19/2010	12:12:03 PM	BCl3 valve closed
11/19/2010	12:12:03 PM	PH3 valve closed
11/19/2010	12:12:03 PM	SiCl4 pre valve closed
11/19/2010	12:12:03 PM	SiCl4 post valve closed
11/19/2010	12:12:03 PM	Bubbler valve closed
11/19/2010	12:12:03 PM	Main Vac valve opened
11/19/2010	12:12:03 PM	Bypass valve opened
11/19/2010	12:12:03 PM	Helium MFC set to  0.000000
11/19/2010	12:12:03 PM	H2 MFC set to  0.000000
11/19/2010	12:12:03 PM	BCl3 MFC set to  0.000000
11/19/2010	12:12:03 PM	PHl3 MFC set to  0.000000
11/19/2010	12:12:03 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:12:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:12:04 PM	Tube furnace set to 0
11/19/2010	12:13:04 PM	H2 valve closed
11/19/2010	12:13:04 PM	BCl3 valve closed
11/19/2010	12:13:04 PM	PH3 valve closed
11/19/2010	12:13:04 PM	SiCl4 pre valve closed
11/19/2010	12:13:04 PM	SiCl4 post valve closed
11/19/2010	12:13:04 PM	Bubbler valve closed
11/19/2010	12:13:04 PM	Helium valve opened
11/19/2010	12:13:04 PM	Main Vac valve opened
11/19/2010	12:13:04 PM	Bypass valve opened
11/19/2010	12:13:04 PM	Helium MFC set to  100.000000
11/19/2010	12:13:04 PM	H2 MFC set to  0.000000
11/19/2010	12:13:04 PM	BCl3 MFC set to  0.000000
11/19/2010	12:13:04 PM	PHl3 MFC set to  0.000000
11/19/2010	12:13:04 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:13:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:13:04 PM	Tube furnace set to 0
11/19/2010	12:13:55 PM	Helium valve closed
11/19/2010	12:13:55 PM	H2 valve closed
11/19/2010	12:13:55 PM	BCl3 valve closed
11/19/2010	12:13:55 PM	PH3 valve closed
11/19/2010	12:13:55 PM	SiCl4 pre valve closed
11/19/2010	12:13:55 PM	SiCl4 post valve closed
11/19/2010	12:13:55 PM	Bubbler valve closed
11/19/2010	12:13:55 PM	Main Vac valve opened
11/19/2010	12:13:55 PM	Bypass valve opened
11/19/2010	12:13:55 PM	Helium MFC set to  0.000000
11/19/2010	12:13:55 PM	H2 MFC set to  0.000000
11/19/2010	12:13:55 PM	BCl3 MFC set to  0.000000
11/19/2010	12:13:55 PM	PHl3 MFC set to  0.000000
11/19/2010	12:13:55 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:13:55 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:13:55 PM	Tube furnace set to 0
11/19/2010	12:14:39 PM	H2 valve closed
11/19/2010	12:14:39 PM	BCl3 valve closed
11/19/2010	12:14:39 PM	PH3 valve closed
11/19/2010	12:14:39 PM	SiCl4 pre valve closed
11/19/2010	12:14:39 PM	SiCl4 post valve closed
11/19/2010	12:14:39 PM	Bubbler valve closed
11/19/2010	12:14:39 PM	Helium valve opened
11/19/2010	12:14:39 PM	Main Vac valve opened
11/19/2010	12:14:39 PM	Bypass valve opened
11/19/2010	12:14:39 PM	Helium MFC set to  100.000000
11/19/2010	12:14:39 PM	H2 MFC set to  0.000000
11/19/2010	12:14:39 PM	BCl3 MFC set to  0.000000
11/19/2010	12:14:39 PM	PHl3 MFC set to  0.000000
11/19/2010	12:14:39 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:14:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:14:39 PM	Tube furnace set to 0
11/19/2010	12:15:39 PM	Helium valve closed
11/19/2010	12:15:39 PM	H2 valve closed
11/19/2010	12:15:39 PM	BCl3 valve closed
11/19/2010	12:15:39 PM	PH3 valve closed
11/19/2010	12:15:39 PM	SiCl4 pre valve closed
11/19/2010	12:15:39 PM	SiCl4 post valve closed
11/19/2010	12:15:39 PM	Bubbler valve closed
11/19/2010	12:15:39 PM	Main Vac valve opened
11/19/2010	12:15:39 PM	Bypass valve opened
11/19/2010	12:15:39 PM	Helium MFC set to  0.000000
11/19/2010	12:15:39 PM	H2 MFC set to  0.000000
11/19/2010	12:15:39 PM	BCl3 MFC set to  0.000000
11/19/2010	12:15:39 PM	PHl3 MFC set to  0.000000
11/19/2010	12:15:39 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:15:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:15:39 PM	Tube furnace set to 0
11/19/2010	12:16:39 PM	H2 valve closed
11/19/2010	12:16:39 PM	BCl3 valve closed
11/19/2010	12:16:39 PM	PH3 valve closed
11/19/2010	12:16:39 PM	SiCl4 pre valve closed
11/19/2010	12:16:39 PM	SiCl4 post valve closed
11/19/2010	12:16:39 PM	Bubbler valve closed
11/19/2010	12:16:39 PM	Helium valve opened
11/19/2010	12:16:39 PM	Main Vac valve opened
11/19/2010	12:16:39 PM	Bypass valve opened
11/19/2010	12:16:39 PM	Helium MFC set to  100.000000
11/19/2010	12:16:39 PM	H2 MFC set to  0.000000
11/19/2010	12:16:39 PM	BCl3 MFC set to  0.000000
11/19/2010	12:16:39 PM	PHl3 MFC set to  0.000000
11/19/2010	12:16:39 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:16:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:16:39 PM	Tube furnace set to 0
11/19/2010	12:17:39 PM	Helium valve closed
11/19/2010	12:17:39 PM	H2 valve closed
11/19/2010	12:17:39 PM	BCl3 valve closed
11/19/2010	12:17:39 PM	PH3 valve closed
11/19/2010	12:17:39 PM	SiCl4 pre valve closed
11/19/2010	12:17:39 PM	SiCl4 post valve closed
11/19/2010	12:17:39 PM	Bubbler valve closed
11/19/2010	12:17:39 PM	Main Vac valve opened
11/19/2010	12:17:39 PM	Bypass valve opened
11/19/2010	12:17:39 PM	Helium MFC set to  0.000000
11/19/2010	12:17:39 PM	H2 MFC set to  0.000000
11/19/2010	12:17:39 PM	BCl3 MFC set to  0.000000
11/19/2010	12:17:39 PM	PHl3 MFC set to  0.000000
11/19/2010	12:17:39 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:17:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:17:39 PM	Tube furnace set to 0
11/19/2010	12:18:39 PM	H2 valve closed
11/19/2010	12:18:40 PM	BCl3 valve closed
11/19/2010	12:18:40 PM	PH3 valve closed
11/19/2010	12:18:40 PM	SiCl4 pre valve closed
11/19/2010	12:18:40 PM	SiCl4 post valve closed
11/19/2010	12:18:40 PM	Bubbler valve closed
11/19/2010	12:18:40 PM	Helium valve opened
11/19/2010	12:18:40 PM	Main Vac valve opened
11/19/2010	12:18:40 PM	Bypass valve opened
11/19/2010	12:18:40 PM	Helium MFC set to  100.000000
11/19/2010	12:18:40 PM	H2 MFC set to  0.000000
11/19/2010	12:18:40 PM	BCl3 MFC set to  0.000000
11/19/2010	12:18:40 PM	PHl3 MFC set to  0.000000
11/19/2010	12:18:40 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:18:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:18:40 PM	Tube furnace set to 0
11/19/2010	12:19:40 PM	Helium valve closed
11/19/2010	12:19:40 PM	H2 valve closed
11/19/2010	12:19:40 PM	BCl3 valve closed
11/19/2010	12:19:40 PM	PH3 valve closed
11/19/2010	12:19:40 PM	SiCl4 pre valve closed
11/19/2010	12:19:40 PM	SiCl4 post valve closed
11/19/2010	12:19:40 PM	Bubbler valve closed
11/19/2010	12:19:40 PM	Main Vac valve opened
11/19/2010	12:19:40 PM	Bypass valve opened
11/19/2010	12:19:40 PM	Helium MFC set to  0.000000
11/19/2010	12:19:40 PM	H2 MFC set to  0.000000
11/19/2010	12:19:40 PM	BCl3 MFC set to  0.000000
11/19/2010	12:19:40 PM	PHl3 MFC set to  0.000000
11/19/2010	12:19:40 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:19:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:19:40 PM	Tube furnace set to 0
11/19/2010	12:19:41 PM	Run finished at 12:19 PM
11/19/2010	12:19:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/19/2010	12:24:36 PM	Bypass valve closed
11/19/2010	12:24:37 PM	Main Vac valve closed
11/19/2010	12:24:53 PM	Bypass valve opened
11/19/2010	12:24:53 PM	Main Vac valve opened
11/19/2010	12:25:30 PM	Helium MFC set to  100.000000
11/19/2010	12:25:30 PM	Helium valve opened
11/19/2010	12:25:33 PM	Helium valve closed
11/19/2010	12:26:18 PM	Recipe started at 12:26 PM
11/19/2010	12:26:18 PM	Helium valve closed
11/19/2010	12:26:18 PM	BCl3 valve closed
11/19/2010	12:26:18 PM	PH3 valve closed
11/19/2010	12:26:18 PM	SiCl4 pre valve closed
11/19/2010	12:26:18 PM	SiCl4 post valve closed
11/19/2010	12:26:18 PM	Main Vac valve closed
11/19/2010	12:26:18 PM	Bypass valve closed
11/19/2010	12:26:18 PM	Bubbler valve closed
11/19/2010	12:26:18 PM	H2 valve opened
11/19/2010	12:26:18 PM	Helium MFC set to  0.000000
11/19/2010	12:26:18 PM	H2 MFC set to  500.000000
11/19/2010	12:26:18 PM	BCl3 MFC set to  0.000000
11/19/2010	12:26:18 PM	PHl3 MFC set to  0.000000
11/19/2010	12:26:18 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:26:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:26:18 PM	Tube furnace set to 0
11/19/2010	12:27:36 PM	Helium valve closed
11/19/2010	12:27:36 PM	BCl3 valve closed
11/19/2010	12:27:36 PM	PH3 valve closed
11/19/2010	12:27:36 PM	SiCl4 pre valve closed
11/19/2010	12:27:36 PM	SiCl4 post valve closed
11/19/2010	12:27:36 PM	Main Vac valve closed
11/19/2010	12:27:36 PM	Bypass valve closed
11/19/2010	12:27:36 PM	H2 valve opened
11/19/2010	12:27:36 PM	Bubbler valve opened
11/19/2010	12:27:36 PM	Helium MFC set to  0.000000
11/19/2010	12:27:36 PM	H2 MFC set to  500.000000
11/19/2010	12:27:36 PM	BCl3 MFC set to  0.000000
11/19/2010	12:27:36 PM	PHl3 MFC set to  0.000000
11/19/2010	12:27:36 PM	SiCl4 MFC set to  0.000000
11/19/2010	12:27:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:27:36 PM	Tube furnace set to 1000
11/19/2010	12:47:36 PM	Helium valve closed
11/19/2010	12:47:36 PM	PH3 valve closed
11/19/2010	12:47:36 PM	Main Vac valve closed
11/19/2010	12:47:36 PM	Bypass valve closed
11/19/2010	12:47:36 PM	H2 valve opened
11/19/2010	12:47:36 PM	BCl3 valve opened
11/19/2010	12:47:36 PM	SiCl4 pre valve opened
11/19/2010	12:47:36 PM	SiCl4 post valve opened
11/19/2010	12:47:36 PM	Bubbler valve opened
11/19/2010	12:47:36 PM	Helium MFC set to  0.000000
11/19/2010	12:47:36 PM	H2 MFC set to  500.000000
11/19/2010	12:47:36 PM	BCl3 MFC set to  12.000000
11/19/2010	12:47:36 PM	PHl3 MFC set to  0.000000
11/19/2010	12:47:36 PM	SiCl4 MFC set to  50.000000
11/19/2010	12:47:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	12:47:36 PM	Tube furnace set to 1000
11/19/2010	1:02:36 PM	H2 valve closed
11/19/2010	1:02:36 PM	BCl3 valve closed
11/19/2010	1:02:36 PM	PH3 valve closed
11/19/2010	1:02:36 PM	SiCl4 pre valve closed
11/19/2010	1:02:36 PM	SiCl4 post valve closed
11/19/2010	1:02:36 PM	Main Vac valve closed
11/19/2010	1:02:36 PM	Bypass valve closed
11/19/2010	1:02:36 PM	Helium valve opened
11/19/2010	1:02:36 PM	Bubbler valve opened
11/19/2010	1:02:36 PM	Helium MFC set to  500.000000
11/19/2010	1:02:36 PM	H2 MFC set to  0.000000
11/19/2010	1:02:36 PM	BCl3 MFC set to  0.000000
11/19/2010	1:02:36 PM	PHl3 MFC set to  0.000000
11/19/2010	1:02:36 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:02:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	1:02:37 PM	Tube furnace set to 950
11/19/2010	1:07:37 PM	H2 valve closed
11/19/2010	1:07:37 PM	BCl3 valve closed
11/19/2010	1:07:37 PM	PH3 valve closed
11/19/2010	1:07:37 PM	SiCl4 pre valve closed
11/19/2010	1:07:37 PM	SiCl4 post valve closed
11/19/2010	1:07:37 PM	Main Vac valve closed
11/19/2010	1:07:37 PM	Bypass valve closed
11/19/2010	1:07:37 PM	Helium valve opened
11/19/2010	1:07:37 PM	Bubbler valve opened
11/19/2010	1:07:37 PM	Helium MFC set to  500.000000
11/19/2010	1:07:37 PM	H2 MFC set to  0.000000
11/19/2010	1:07:37 PM	BCl3 MFC set to  0.000000
11/19/2010	1:07:37 PM	PHl3 MFC set to  0.000000
11/19/2010	1:07:37 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:07:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	1:07:37 PM	Tube furnace set to 900
11/19/2010	1:12:37 PM	H2 valve closed
11/19/2010	1:12:37 PM	BCl3 valve closed
11/19/2010	1:12:37 PM	PH3 valve closed
11/19/2010	1:12:37 PM	SiCl4 pre valve closed
11/19/2010	1:12:37 PM	SiCl4 post valve closed
11/19/2010	1:12:37 PM	Main Vac valve closed
11/19/2010	1:12:37 PM	Bypass valve closed
11/19/2010	1:12:37 PM	Helium valve opened
11/19/2010	1:12:37 PM	Bubbler valve opened
11/19/2010	1:12:37 PM	Helium MFC set to  500.000000
11/19/2010	1:12:37 PM	H2 MFC set to  0.000000
11/19/2010	1:12:37 PM	BCl3 MFC set to  0.000000
11/19/2010	1:12:37 PM	PHl3 MFC set to  0.000000
11/19/2010	1:12:37 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:12:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	1:12:37 PM	Tube furnace set to 850
11/19/2010	1:17:37 PM	H2 valve closed
11/19/2010	1:17:37 PM	BCl3 valve closed
11/19/2010	1:17:37 PM	PH3 valve closed
11/19/2010	1:17:37 PM	SiCl4 pre valve closed
11/19/2010	1:17:37 PM	SiCl4 post valve closed
11/19/2010	1:17:37 PM	Main Vac valve closed
11/19/2010	1:17:37 PM	Bypass valve closed
11/19/2010	1:17:37 PM	Helium valve opened
11/19/2010	1:17:37 PM	Bubbler valve opened
11/19/2010	1:17:37 PM	Helium MFC set to  500.000000
11/19/2010	1:17:37 PM	H2 MFC set to  0.000000
11/19/2010	1:17:37 PM	BCl3 MFC set to  0.000000
11/19/2010	1:17:37 PM	PHl3 MFC set to  0.000000
11/19/2010	1:17:37 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:17:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	1:17:37 PM	Tube furnace set to 800
11/19/2010	1:21:55 PM	Run aborted at 1:21 PM
11/19/2010	1:21:55 PM	Helium valve closed
11/19/2010	1:21:55 PM	H2 valve closed
11/19/2010	1:21:55 PM	BCl3 valve closed
11/19/2010	1:21:55 PM	PH3 valve closed
11/19/2010	1:21:55 PM	SiCl4 pre valve closed
11/19/2010	1:21:55 PM	SiCl4 post valve closed
11/19/2010	1:21:55 PM	Bypass valve closed
11/19/2010	1:21:55 PM	Main Vac valve closed
11/19/2010	1:21:55 PM	Bubbler valve closed
11/19/2010	1:21:55 PM	Helium MFC set to  0.000000
11/19/2010	1:21:55 PM	H2 MFC set to  0.000000
11/19/2010	1:21:55 PM	BCl3 MFC set to  0.000000
11/19/2010	1:21:55 PM	PHl3 MFC set to  0.000000
11/19/2010	1:21:55 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:21:56 PM	Tube furnace set to 0
11/19/2010	1:22:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2010	1:22:12 PM	Recipe started at 1:22 PM
11/19/2010	1:22:12 PM	Helium valve closed
11/19/2010	1:22:12 PM	H2 valve closed
11/19/2010	1:22:12 PM	BCl3 valve closed
11/19/2010	1:22:12 PM	PH3 valve closed
11/19/2010	1:22:12 PM	SiCl4 pre valve closed
11/19/2010	1:22:12 PM	SiCl4 post valve closed
11/19/2010	1:22:12 PM	Main Vac valve closed
11/19/2010	1:22:12 PM	Bubbler valve closed
11/19/2010	1:22:12 PM	Bypass valve opened
11/19/2010	1:22:12 PM	Helium MFC set to  0.000000
11/19/2010	1:22:12 PM	H2 MFC set to  0.000000
11/19/2010	1:22:12 PM	BCl3 MFC set to  0.000000
11/19/2010	1:22:12 PM	PHl3 MFC set to  0.000000
11/19/2010	1:22:12 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:22:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	1:22:12 PM	Tube furnace set to 0
11/19/2010	1:22:49 PM	Helium valve closed
11/19/2010	1:22:49 PM	H2 valve closed
11/19/2010	1:22:49 PM	BCl3 valve closed
11/19/2010	1:22:49 PM	PH3 valve closed
11/19/2010	1:22:49 PM	SiCl4 pre valve closed
11/19/2010	1:22:49 PM	SiCl4 post valve closed
11/19/2010	1:22:49 PM	Bubbler valve closed
11/19/2010	1:22:49 PM	Main Vac valve opened
11/19/2010	1:22:49 PM	Bypass valve opened
11/19/2010	1:22:49 PM	Helium MFC set to  0.000000
11/19/2010	1:22:49 PM	H2 MFC set to  0.000000
11/19/2010	1:22:49 PM	BCl3 MFC set to  0.000000
11/19/2010	1:22:49 PM	PHl3 MFC set to  0.000000
11/19/2010	1:22:49 PM	SiCl4 MFC set to  0.000000
11/19/2010	1:22:49 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	1:22:49 PM	Tube furnace set to 0
11/19/2010	1:22:49 PM	Run finished at 1:22 PM
11/19/2010	1:22:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2010	3:50:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2010	3:50:41 PM	Recipe started at 3:50 PM
11/19/2010	3:50:41 PM	H2 valve closed
11/19/2010	3:50:41 PM	BCl3 valve closed
11/19/2010	3:50:41 PM	PH3 valve closed
11/19/2010	3:50:41 PM	SiCl4 pre valve closed
11/19/2010	3:50:41 PM	SiCl4 post valve closed
11/19/2010	3:50:41 PM	Main Vac valve closed
11/19/2010	3:50:41 PM	Bypass valve closed
11/19/2010	3:50:41 PM	Bubbler valve closed
11/19/2010	3:50:41 PM	Helium valve opened
11/19/2010	3:50:41 PM	Helium MFC set to  500.000000
11/19/2010	3:50:41 PM	H2 MFC set to  0.000000
11/19/2010	3:50:41 PM	BCl3 MFC set to  0.000000
11/19/2010	3:50:41 PM	PHl3 MFC set to  0.000000
11/19/2010	3:50:41 PM	SiCl4 MFC set to  0.000000
11/19/2010	3:50:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	3:50:41 PM	Tube furnace set to 0
11/19/2010	3:52:01 PM	Helium valve closed
11/19/2010	3:52:01 PM	H2 valve closed
11/19/2010	3:52:01 PM	BCl3 valve closed
11/19/2010	3:52:01 PM	PH3 valve closed
11/19/2010	3:52:01 PM	SiCl4 pre valve closed
11/19/2010	3:52:01 PM	SiCl4 post valve closed
11/19/2010	3:52:01 PM	Main Vac valve closed
11/19/2010	3:52:01 PM	Bypass valve closed
11/19/2010	3:52:01 PM	Bubbler valve closed
11/19/2010	3:52:01 PM	Helium MFC set to  0.000000
11/19/2010	3:52:01 PM	H2 MFC set to  0.000000
11/19/2010	3:52:01 PM	BCl3 MFC set to  0.000000
11/19/2010	3:52:01 PM	PHl3 MFC set to  0.000000
11/19/2010	3:52:01 PM	SiCl4 MFC set to  0.000000
11/19/2010	3:52:01 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	3:52:01 PM	Tube furnace set to 0
11/19/2010	3:52:02 PM	Run finished at 3:52 PM
11/19/2010	3:52:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2010	3:59:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2010	3:59:28 PM	Recipe started at 3:59 PM
11/19/2010	3:59:28 PM	H2 valve closed
11/19/2010	3:59:28 PM	BCl3 valve closed
11/19/2010	3:59:28 PM	PH3 valve closed
11/19/2010	3:59:28 PM	SiCl4 pre valve closed
11/19/2010	3:59:28 PM	SiCl4 post valve closed
11/19/2010	3:59:28 PM	Main Vac valve closed
11/19/2010	3:59:28 PM	Bypass valve closed
11/19/2010	3:59:28 PM	Bubbler valve closed
11/19/2010	3:59:28 PM	Helium valve opened
11/19/2010	3:59:28 PM	Helium MFC set to  500.000000
11/19/2010	3:59:28 PM	H2 MFC set to  0.000000
11/19/2010	3:59:29 PM	BCl3 MFC set to  0.000000
11/19/2010	3:59:29 PM	PHl3 MFC set to  0.000000
11/19/2010	3:59:29 PM	SiCl4 MFC set to  0.000000
11/19/2010	3:59:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	3:59:29 PM	Tube furnace set to 0
11/19/2010	3:59:29 PM	Helium valve closed
11/19/2010	3:59:29 PM	H2 valve closed
11/19/2010	3:59:29 PM	BCl3 valve closed
11/19/2010	3:59:29 PM	PH3 valve closed
11/19/2010	3:59:29 PM	SiCl4 pre valve closed
11/19/2010	3:59:29 PM	SiCl4 post valve closed
11/19/2010	3:59:29 PM	Main Vac valve closed
11/19/2010	3:59:29 PM	Bypass valve closed
11/19/2010	3:59:29 PM	Bubbler valve closed
11/19/2010	3:59:29 PM	Helium MFC set to  0.000000
11/19/2010	3:59:29 PM	H2 MFC set to  0.000000
11/19/2010	3:59:29 PM	BCl3 MFC set to  0.000000
11/19/2010	3:59:29 PM	PHl3 MFC set to  0.000000
11/19/2010	3:59:29 PM	SiCl4 MFC set to  0.000000
11/19/2010	3:59:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	3:59:29 PM	Tube furnace set to 0
11/19/2010	3:59:29 PM	Run finished at 3:59 PM
11/19/2010	3:59:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2010	3:59:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2010	3:59:33 PM	Recipe started at 3:59 PM
11/19/2010	3:59:33 PM	Helium valve closed
11/19/2010	3:59:33 PM	H2 valve closed
11/19/2010	3:59:33 PM	BCl3 valve closed
11/19/2010	3:59:33 PM	PH3 valve closed
11/19/2010	3:59:33 PM	SiCl4 pre valve closed
11/19/2010	3:59:33 PM	SiCl4 post valve closed
11/19/2010	3:59:33 PM	Main Vac valve closed
11/19/2010	3:59:33 PM	Bubbler valve closed
11/19/2010	3:59:33 PM	Bypass valve opened
11/19/2010	3:59:33 PM	Helium MFC set to  0.000000
11/19/2010	3:59:33 PM	H2 MFC set to  0.000000
11/19/2010	3:59:33 PM	BCl3 MFC set to  0.000000
11/19/2010	3:59:33 PM	PHl3 MFC set to  0.000000
11/19/2010	3:59:33 PM	SiCl4 MFC set to  0.000000
11/19/2010	3:59:33 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	3:59:33 PM	Tube furnace set to 0
11/19/2010	4:00:25 PM	Helium valve closed
11/19/2010	4:00:25 PM	H2 valve closed
11/19/2010	4:00:25 PM	BCl3 valve closed
11/19/2010	4:00:25 PM	PH3 valve closed
11/19/2010	4:00:25 PM	SiCl4 pre valve closed
11/19/2010	4:00:25 PM	SiCl4 post valve closed
11/19/2010	4:00:25 PM	Bubbler valve closed
11/19/2010	4:00:25 PM	Main Vac valve opened
11/19/2010	4:00:25 PM	Bypass valve opened
11/19/2010	4:00:25 PM	Helium MFC set to  0.000000
11/19/2010	4:00:25 PM	H2 MFC set to  0.000000
11/19/2010	4:00:25 PM	BCl3 MFC set to  0.000000
11/19/2010	4:00:25 PM	PHl3 MFC set to  0.000000
11/19/2010	4:00:25 PM	SiCl4 MFC set to  0.000000
11/19/2010	4:00:25 PM	Bypass solenoid MFC set to  0.000000
11/19/2010	4:00:26 PM	Tube furnace set to 0
11/19/2010	4:00:26 PM	Run finished at 4:00 PM
11/19/2010	4:00:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
